Université Paris-Saclay hosts prestigious scientists as part of its "Chaires d'Alembert". These laureates give an "inaugural lesson": this seminar intended for all audiences will be given by the laureate of the Chaire, including a presentation by the host team.

Regina Soufli is principal investigator on programs related to extreme ultraviolet (EUV) and x-ray optics for semiconductor lithography, solar physics and astrophysics, synchrotron and free-electron lasers, and high-energy physics at Lawrence Livermore National Lab.

She is a Fellow of the Optical Society (OSA) and a Senior Member of SPIE. She was granted a “Jean d’Alembert” fellowship by Université Paris-Saclay.

Summary

The emergence of novel Extreme Ultraviolet (EUV) and x-ray sources with unprecedented brightness and coherence has ushered a new era in the fields of materials science, chemistry, plasma physics, biology and life sciences. Multilayer interference mirrors are enabling optical components in most EUV/x-ray optical systems.

However, achieving efficient multilayer coatings for a specific wavelength range is a daunting task. This is because multilayer coatings need to obey a multitude of very stringent requirements including very accurate knowledge of the refractive index, and long-term stability and resistance to degradation processes such as oxidation and corrosion. 

This presentation will discuss the state-of-the-art, recent breakthroughs and future challenges in the development of advanced multilayer coatings for the EUV/soft x-ray range.

Location

Auditorium Institut d’Optique Graduate School

2 avenue Augustin Fresnel

91120 Palaiseau